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ChemLogic Cassettes

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  1. Gas Formula
    CH2F2
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Detection Principle
  1. Colorimetric 1item
Detection Range
  1. Varies by Gas (down to ppb) 1item
Gas Formula
  1. AsH3 1item
  2. B2H6 2items
  3. BF3 2items
  4. C4F6 2items
  5. CH2F2 2items
  6. CH3F 2items
  7. Cl2 2items
  8. ClO2 2items
  9. COCl2 1item
  10. DMA 1item
  11. F2 2items
  12. GeH4 2items
  13. H2S 1item
  14. H2Se 2items
  15. HBr 1item
  16. HCl 1item
  17. HCOOH 1item
  18. HDI 1item
  19. HF 1item
  20. HMDI 1item
  21. IPDI 1item
  22. N2H4 2items
  23. NDI 1item
  24. NH3 2items
  25. NO2 1item
  26. PH3 1item
  27. SiH4 1item
  28. TDMAT 1item
  29. TMA 1item
Gas Name
  1. Ammonia (NH3) 1item
  2. Arsine (AsH3) 1item
  3. Boron Trifluoride (BF3) 1item
  4. Chlorine (Cl2) 1item
  5. Chlorine Dioxide (ClO2) 1item
  6. Chlorine Trifluoride (ClF3) 1item
  7. Chlorobenzene (C6H5Cl) 1item
  8. Diborane (B2H6) 1item
  9. Difluoromethane-R32 (CH2F2) 1item
  10. Dimethylacetamide (DMA) 1item
  11. Fluorine (F2) 1item
  12. Germane (GeH4) 1item
  13. Hexafluorobutadiene (C4F6) 1item
  14. Hydrazine (N2H4) 1item
  15. Hydrogen Chloride (HCl) 1item
  16. Hydrogen Fluoride (HF) 1item
  17. Hydrogen Selenide (H2Se) 2items
  18. Hydrogen Sulfide (H2S) 1item
  19. Methyl Fluoride-R41 (CH3F) 1item
  20. Nitrogen Dioxide (NO2) 1item
  21. Phosgene (COCl2) 1item
  22. Phosphine (PH3) 1item
  23. Silane (SiH4) 1item
  24. Tetrakis(dimethylamino)titanium (TDMAT) 1item
  25. Trimethylamine (TMA) 1item
Industry
  1. Semiconductor 1item

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